最小流量：0.1SCCM 最大流量：500SLPM
MC200高精型氣體層流質(zhì)量流量控制器向?qū)Ω呖刂凭扔行枨蟮墓I(yè)配套用戶提供計量級精度0.5級（±0.5%設(shè)定值精度），通過產(chǎn)品內(nèi)置的壓力、溫度傳感器的精確補(bǔ)償及獨(dú)創(chuàng)核心算法，在低零點(diǎn)、溫度、壓力漂移量上表現(xiàn)出了杰出性能。堅固的金屬外殼，使產(chǎn)品在工業(yè)復(fù)雜環(huán)境下確保耐用性和強(qiáng)抗電磁干擾性能。內(nèi)置多種氣體和混氣設(shè)置，數(shù)字式和模擬式的通訊方式，實(shí)現(xiàn)流量的精確測量和控制。
PIPG-MC201-00-0500 | 0.5S CCM
PIPG-MC201-01-0001 | 1S CCM
PIPG-MC201-01-0002 | 2S CCM
PIPG-MC201-01-0005 | 5S CCM
PIPG-MC201-01-0010 | 10S CCM
PIPG-MC201-01-0020 | 20S CCM
PIPG-MC202-01-0050 | 50SCCM
PIPG-MC202-01-0100 | 100SCCM
PIPG-MC202-01-0200 | 200SCCM
PIPG-MC202-01-0500 | 500SCCM
PIPG-MC202-01-1000 | 1000SCCM
PIPG-MC202-01-2000 | 2000SCCM
PIPG-MC220-02-0005 | 5SLPM
PIPG-MC220-02-0010 | 10SLPM
PIPG-MC220-02-0020 | 20SLPM
PIPG-MC220-02-0050 | 50SLPM
PIPG-MC220-02-0100 | 100SLPM
PIPG-MC220-02-0200 | 200SLPM
PIPG-MC250-02-0500 | 500SLPM
PIPG-MC250-02-1000 | 1000SLPM
PIPG-MC250-02-1500 | 1500SLPM
PIPG-MC250-02-2000 | 2000SLPM
PIPG-MC250-02-3000 | 3000SLPM
PIPG-MC250-02-4000 | 4000SLPM
PIPG-MC250-02-5000 | 5000SLPM
PIPG-MC201-00-0500 | 0.5S CCM
PIPG-MC201-01-0001 | 1S CCM
PIPG-MC201-01-0002 | 2S CCM
PIPG-MC201-01-0005 | 5S CCM
PIPG-MC201-01-0010 | 10S CCM
PIPG-MC201-01-0020 | 20S CCM
