最小流量：0.1SCCM 最大流量：1000SLPM
M100-HP高壓氣體層流質量流量計與S100-HP高壓型的區別在于沒有觸摸式顯示屏，可在高壓環境（1~2MPa）下進行氣體流量的精確測量，精度可達±1.0%讀數，模擬信號和數字信號的通訊方式，適用于對較高工作壓力有流量測量需求的配套客戶。
PIPG-M101-HP-00-0500 | 0.5 SCCM
PIPG-M101-HP-01-0001 | 1 SCCM
PIPG-M101-HP-01-0002 | 2 SCCM
PIPG-M101-HP-01-0005 | 5 SCCM
PIPG-M101-HP-01-0010 | 10 SCCM
PIPG-M101-HP-01-0020 | 20 SCCM
PIPG-M102-HP-01-0050 | 50 SCCM
PIPG-M102-HP-01-0100 | 100 SCCM
PIPG-M102-HP-01-0200 | 200 SCCM
PIPG-M102-HP-01-0500 | 500 SCCM
PIPG-M102-HP-01-1000 | 1000 SCCM
PIPG-M102-HP-01-2000 | 2000 SCCM
PIPG-M120-HP-02-0005 | 5 SLPM
PIPG-M120-HP-02-0010 | 10 SLPM
PIPG-M120-HP-02-0020 | 20 SLPM
PIPG-M120-HP-02-0050 | 50 SLPM
PIPG-M120-HP-02-0100 | 100 SLPM
PIPG-M120-HP-02-0200 | 200 SLPM
PIPG-M150-HP-02-0500 | 500 SLPM
PIPG-M150-HP-02-1000 | 1000 SLPM
PIPG-M101-HP-00-0500 | 0.5 SCCM
PIPG-M101-HP-01-0001 | 1 SCCM
PIPG-M101-HP-01-0002 | 2 SCCM
PIPG-M101-HP-01-0005 | 5 SCCM
PIPG-M101-HP-01-0010 | 10 SCCM
PIPG-M101-HP-01-0020 | 20 SCCM
